Cryogenic (Cryo) Pump

The ECP series cryogenic pump (cryopump) obtains ultra-high vacuum by condensing and adsorbing gases on cold surfaces, with no oil and no moving parts inside the vacuum chamber — so external interference does not affect operation. It reaches an ultimate vacuum around 1×10⁻⁷ Pa with very high pumping speed, especially for water vapour, and offers a long 50,000–60,000+ hour service life at low operating cost versus a diffusion pump. It is widely used in semiconductor and integrated-circuit manufacturing, optoelectronics and coating equipment, with nitrogen speeds from 1,000 to 10,000 L/s.