Innovation Nexus Ltd
Oil Diffusion Vacuum Pump
Vacuum PumpsEOD Series

Oil Diffusion Vacuum Pump

High-speed oil diffusion pump for ultra-high vacuum in coating, furnaces, metallurgy and space-simulation systems.

Pumping Speed
1,800 – 12,000 L/s
Ultimate Vacuum
5×10⁻⁵ Pa
Heater Power
1.4 – 8 kW
Inlet
160 – 500 mm

Highlights

  • Genuine equipment supplied with warranty
  • Professional installation & commissioning
  • 24/7 after-sales support nationwide
  • Genuine spare parts stocked locally

The EOD oil diffusion pump uses a low-pressure, high-speed directional oil-vapour jet to pump gas, and when backed by a suitable fore pump it reaches ultra-high vacuum. Rapid heating gives energy-efficient start-up and a wide flow-rate range covers many system sizes. It is a mainstay for vacuum coating and furnaces, electronics, aerospace, metallurgy, materials processing and space simulation. Pumping speeds span 1,800 to 12,000 L/s.